Effects of annealing ambience on structure and optical-electrical properties of ZnO thin films codoped with Al and Sb
作者单位:Department of PhysicsSchool of physics and nuclear energy engineeringBeijing University of Aeronautics and AstronauticsBeijing 100191China
会议名称:《第六届国际氧化锌及相关材料研讨会》
会议日期:2010年
学科分类:08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程(可授工学、理学学位)]
摘 要:正The ZnO thin films co-doped with Al and Sb have been successfully deposited by a sol-gel spin-coating method on glass substrates and annealed at different ambience for 2 hours. The effects of different annealing ambience on the