Field Emission Properties of Nanocrystalline Carbon Films Generated in Microwave Gas Discharge Plasma
作者单位：Institute of Radio Engineering and Electronics of RAS Saratov Department410009 Saratov P.B.1072
会议名称：《The 5th International Vacuum Electron Sources Conference(IVESC2004)》
会议日期：2004年
学科分类：08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）]
关 键 词：Plasma properties Carbon dioxide Microwave generation Discharges Plasma materials processing Organic materials Microwave devices Plasma chemistry Plasma devices Diamond-like carbon
摘 要：正The carbon film synthesis in a low-pressure microwave （MW） gas discharge plasma is one of promising procedures to obtain carbon electronics materials used in device operating under extreme *** is due to the fact that,by its nature,carbon can generate materials with various chemical bond types compatible, in limiting cases,to the allotropic modifications of graphite,diamond,fullerenes,carbine, and others.