An Assessment of the Recent Development of MEMS Oscillators as Compared with Crystal Oscillators
作者单位：TXC Corporationping Cheng CityTaoyuan CountyTaiwanR.O.C.
会议名称：《第二届全国压电和声波理论及器件技术研讨会》
会议日期：2006年
学科分类：080904[工学-电磁场与微波技术] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学]
摘 要：Due to its high Q and temperature stable properties,for many years,quartz crystal based oscillators are important clock sources in consumer,commercial,industrial and military digital sub-modules and *** demand for quartz crystal resonators and oscillators continues to rise. The unique fabrication and encapsulation requirements though render quartz crystal resonators and oscillators difficult or close to impossible to be integrated onto the mature silicon based IC platforms. The recent technical breakthrough of MEMS based resonators and oscillators seem re-ignite the interest in displacing/replacing the quartz crystal technology and to open up again the prospect in clock source *** paper discusses and assesses,from the viewpoint of a quartz crystal manufacturer, such development and its possible impact on the quartz crystal industry which also experiences major progresses in miniaturization,performance enhancement,cost reduction,etc.,in the past few years.