Physical features of the RF lower pressure hybrid discharge
作者单位：Physical Faculty of Moscow State University
会议名称：《第三届微电子及等离子体技术国际会议》
会议日期：2011年
学科分类：07[理学] 070204[理学-等离子体物理] 0702[理学-物理学]
关 键 词：Microelectronic Device RF Plasma Source RF discharge inductive capacitive hybrid discharg.
摘 要：The experimental study of the plasma parameters as well as RF power input mechanism to the new modification of RF dscharge,*** discharge sustained by both potential and vortical RF electrical fields is *** hybrid discharge was sustained by the connected in parallel spiral inductor and electrodes of *** variable disjunctive capacitor was included into the capacitive channel of the discharge in order to control the contribution of the RF power coupled through the capacitive *** low values of RF generator power the RF power is shown to be coupled mainly the through capacitive channel of the discharge,later at higher values of RF generator power the role of inductive channel becomes more *** lower is the value of the disjunctive capacitor C included to the capacitive channel the higher is the contribution of the inductive *** presence of the capacitive channel in the hybrid RF discharge leads to the change of the RF power value coupled throuth the inductive channel while the presence of the inductive channel results in the change of the nearelectrode potential drop value if compared to the pure RF capacitive *** results open high possibilities in the controlling of the plasma parameters of the plasma source in accordance with the requirements of plasma technologies.