Enviro ESCA–The Beginning of a New Era
作者单位：SPECS Surface Nano Analysis GmbH
会议名称：《中国化学会第30届学术年会》
会议日期：2016年
学科分类：07[理学] 070302[理学-分析化学] 0703[理学-化学]
摘 要：正Since many decades XPS（or ESCA）is the well-accepted standard method for non-destructive chemical analysis of solid surfaces.To fulfill this task existing ESCA tools combine reliable quantitative chemical analysis with comfortable sample handling concepts,integrated into fully automated compact designs.Over the last years it has been possible to develop XPS