AN INVESTIGATION ON（100）MONOEPITAXIAL DIAMOND MONOCRYSTALLINE FILMS

作     者：Z.M.Zhang S.H.Li Q.Y.Cai H.M.Chen X.C.He D.L.Ling S.J.Wang Z.W.Wu S.S.Jiang C.Z.Ge N.B.Ming 

作者单位：Shanghai Jiao Tong Univ. Nanjing Univ. 

会议名称：《Sixteenth Congress of the International Union of Crystallography》

会议日期：1993年

学科分类：081704[工学-应用化学] 07[理学] 08[工学] 0817[工学-化学工程与技术] 0703[理学-化学] 070301[理学-无机化学] 

摘      要：正For diamond’s excellent microelectrical properties and the rapid development of CVD techniques, the diamond high temperature semiconductor materials have been received increasing *** our work,we have obtained quite smooth homoepitaxial monocrystalline films deposited on（100） oriented HT-HP synthesized diamond by microwave PCVD *** microwave frequency was 2.45 GHz,internal dimension of the quartz horizontal reaction tube was 35mm the reaction gases were acetone and hydrogen,