Direct-measuring method of vapor pressure
作者单位：National Institute of Advanced Industrial Science and Technology Temson Inc. Tem-Tech Lab.
会议名称：《中国真空学会2008年学术年会》
会议日期：2008年
学科分类：08[工学] 0804[工学-仪器科学与技术]
摘 要：*** Pressure measurement between 10 Pa (～100 Torr) and 10 Pa (～10 Torr) is important for industrial ***,it is difficult to measure these wide ranges of pressure by5 single manometer. A capacitance manometer made of metal diaphragm is commonly used between 10 Pa and 10 *** higher temperature over 100 degrees,however,a metal diaphragm exhibits large hysteresis by