CALIBRATION OF A THERMAL MEMS SHEAR STRESS SENSOR ARRAY
作者单位：State Key Laboratory of AerodynamicsChina Aerodynamics Research and Development Center High Speed Aerodynamics Research InstituteChina Aerodynamics Research and Development Center
会议名称：《2012全国压电和声波理论及器件技术研讨会》
会议日期：2012年
学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程]
基 金：supported by the National Natural Science Foundation of China(No.11272335 and 10972233)
关 键 词：MEMS Shear stress sensor Calibration Flow measurement High-speed wind tunnel
摘 要：Accurate measurement of wall shear stress is very important for understanding wall bounded shear flows properly,because it provides significant information about the flow phenomena,including viscous drag,the position where the flow transits to turbulence or separates from the *** measurement of shear stresses based on traditional fabrication technology are much too bulky to accomplish the task perfectly and may destroy the research matrix surface and most likely impossible to be used in any large-scale *** conflict between sensor size and sensitivity is the maximal impedance to the *** making the sensor smaller flexible with high time resolution can bring the boundary layer research to a new *** way of achieving these requirements is micro-fabricated *** paper presents that by taking advantage of MEMS fabrication techniques,sensors can response very quickly to the fluctuations in the flow and do not destroy the model ***,combining an integrating technology,plenty of sensors can be integrated to a membrane for measuring the wall shear stress in larger area *** characterization of a MEMS based thermal shear stress sensor array for high speed flow is presented in this *** static responses for different overheat ratios were obtained via a fully developed duct flow with Ma number 0.1-0.6,and the influence of temperature to the sensor output voltage was measured using a heater with four resistance coils which is able to change the flow temperature of the test section from 289-313 *** relationship between the output voltage and shear stress at overheat ratio of 1.2 is *** to that above,calibration methods is very key technique for application of MEMS sensors on flow measurement in high speed wind ***,the method can provide useful help for application and development of MEMS sensors.