MODELING OF MULTILAYERED ACOUSTIC WAVE DEVICES WITH THE METHOD OF REVERBERATION-RAY MATRIX

作     者：Yong-qiang GUO Key Laboratory of Mechanics on Disaster and Environment in Western China,Ministry of Education, and School of Civil Engineering and Mechanics,Lanzhou University,Lanzhou 730000,China Wei-qiu CHEN Key Laboratory of Soft Soils and Geoenvironmental Engineering,Ministry of Education, and Department of Civil Engineering,Zhejiang University,Hangzhou 310027,China 

会议名称：《第三届全国压电和声波理论及器件技术研讨会》

会议日期：2008年

学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 

基　　金：support by the National Natural Science Foundation of China(Nos.10725210 and 10832009) the National Basic Research Program of China(No.2009CB623204) the Specialized Research Fund for the Doctoral Program of Higher Education(No.20060335107) the Program for New Century Excellent Talents in University(No.NCET-05-05010) 

关 键 词：Multilayered piezoelectric structures acoustic wave devices wave propagation method of reverberation-ray matrix 

摘      要：The method of reverberation-ray matrix(MRRM) are modified and extended to the analysis of wave propagation in multilayered acoustic wave devices based on three-dimensional linear *** the plane wave solution assumption,state equations are established whose solutions are expressed with unknown wave *** the framework of MRRM,the phase and scattering relations are properly set up to determine the unknowns without involving exponentially growing functions and matrix inversion operations in an easy and uniform *** the present MRRM is unconditionally stable and free from limitations to the frequency,the thickness of individual layers and the total number of *** surface waves,the interface waves and the bulk waves are all included in the formulation. Therefore,the present formulation applies to SAW devices as well as BAW *** examples are given to illustrate the well performance of the proposed formulation of MRRM for the analysis of free waves in multilayered acoustic wave devices.