NANO-INDENTATION STUDIES OF TRANSPARENT CONDUCTING OXIDE THIN FILMS

作     者：Kaiyang Zeng Furong Zhu Jianqiao Hu Lu Shen Keran Zhang Hao Gong Institute of Materials Research and Engineering 3 Research Link Singapore 117602 Dept. of Mat.Sciences National University of Singapore Lower Kent Ridge Road Singapore 119260 

会议名称：《第8届国际材联电子材料国际研讨会》

会议日期：2002年

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

摘      要：正 Transparent conductive oxide （TCO） thin films have widespread applications due to their unique properties of low electrical resistivity and high optical transmission in the visible spectrum range. TCO films have been used in photovoltaic devices, liquid crystal displays and organic light emitting diodes. It is well known that the optical, electrical, mechanical and morphological properties of TCO films have direct implications for determining and improving the device performance and reliability. Much effort has been