Up-to-date issues and strategies for developing nanometrology standards
会议名称：《第十一次中国生物物理学术大会暨第九届全国会员代表大会》
会议日期：2009年
学科分类：02[经济学] 0202[经济学-应用经济学] 020201[经济学-国民经济学]
基 金：research grants from Shanghai Technology Committee(STC) 03JC14020 & 0452nm085 National Science Foundation of China(NSFC)30470409 Shanghai Xu Hui Region of Science and Technology Committee RCT2008010
关 键 词：Nanometrology Methods Standards Traceability
摘 要：正Unbroken chain of traceability is currently unsettled issues for developing national/international nanometer scale metrology *** present paper will address up-to-date