Interface Constraint Effect in Nano-Sandwiched Thin Film
作者单位：Institute of Applied PhysicsXi'an University State Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong University
会议名称：《中国真空学会2014学术年会》
会议日期：2014年
学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学]
关 键 词：Nano-sandwiched thin film interface constraint stress relaxation micro-particles and nano-wires
摘 要：Micro-particles and nano-wires,small outgrowths were found to appear on upper film surface when metal thin film is confined between two SiN layers deposited by magnetron sputtering and is annealed at an appropriate *** stress evolution during this process is monitored by multi-beam optic stress sensor,and is qualitatively interpreted in terms of elastic and plastic deformation,as well as bulk ***,the interface constraint effect among different layers is *** relaxation of nano-sandwiched thin films behaves in different stress *** a comparative study,SiN/Zn/SiN sandwiches were prepared and studied by the same *** results show that the pertinent geometry is strongly dependent on material types and stress states of the ***,an appropriate mode was suggested to interpret this phenomenon.