Deposition of CrN Coatings by Filtered Cathodic Vacuum Arc
会议名称：《Fifth International Conference on Surface Engineering》
会议日期：2007年
学科分类：080503[工学-材料加工工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）]
关 键 词：PVD Filtered cathodic vacuum arc technique CrN coating Tribological properties
摘 要：CrN coatings were deposited on cemented carbide substrates by filtered cathodic vacuum arc technique(FCVA).The effect of different deposition parameters:nitrogen partial pressure,substrate-bias voltage and preheating of the specimens,on the structural and mechanical properties of the coatings was investigated.X-ray diffraction analysis was used to determine the structure and the composition of the *** tribological behaviour and wear properties of the coatings against Si3N4 ball with diameter of 4 mm were studied under reciprocating sliding *** results showed that a smooth and dense CrN coating with best properties can be obtained provided a pure Cr interlayer was *** optimal deposition parameters were the nitrogen partial pressure of 0.1 Pa,substrate-bias voltage of-100 ***,preheating of the substrate was not good for improving the properties of the *** FCVA CrN coating showed high hardness and good wear resistance,which was probably attributed to its smooth surface and dense ***,the coating flaked off at relatively high normal load(20 N).The wear mechanism of the CrN coatings was a combination of abrasion and oxidation.