Arrays of Coplanar Eletrode Microplasma Devices

作     者：L. G. Meng a * J. P. Xing b Z. H. Liang c C. L. Liu c Z. J. Lin a a School of Physics Shandong University Jinan 250100 China b School of Information Science and Engineering Shandong University Jinan 250100 China c Key Laboratory of Physical Electronics and Devices of the Ministry of Education Xi’an Jiaotong University Xi’an 710049 China 

会议名称：《第18届国际真空大会》

会议日期：2010年

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 

关 键 词：Microplasma array devices multi-discharge phenomenon Pressure-Independent Point coplanar electrodes 

摘      要：We introduce a novel microplasma device with coplanar electrodes （Coplanar Eletrode Microplasma Devices, CEMPD）. The microcavities of the proposed device compose of two coplanar electrodes instead of dielectric or single cathode, which can enhance the density of microcavities. Two kinds of prototype have been fabricated, line array of CEMPD and arrays of CEMPD.