Temperature Compensation of MEMS Based Resonant Sensor with Uniform Mass Sensitivity
作者单位：Department of Electrical Engineering Ashtian Branch islamic Azad University Department of Electrical Engineering islamic Azad University Department of Electrical Engineering Khomein Branch islamic Azad University
会议名称：《第25届中国控制与决策会议》
会议届次：25th
会议日期：2013年
学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程]
关 键 词：Micro resonator Resonance frequency Temperature sensitivity Micro-thermoelectric cooler
摘 要：High sensitive micro resonators are among the best way for measuring the mass of small entities. The principal of these sensors is based on measuring the resonance frequency shift. Putting the entity on the resonator led to change in the resonance frequency of the resonator, but changing the location of entity on the resonator’s surface or changing the temperature can cause undesirable shifts in resonance frequency. To tackle these issues, this paper first introduces a new design for folded springs, these springs attached to a platform for target *** a micro-thermoelectric cooler used to keep the sensor temperature ***3 and SbeTe3 are selected as the n-type and p-type thermoelectric materials respectively. The ceramic interface in thermoelectric coolers is used as a place to putdirectly mass sensors on it.