Effects of adhesion energy and residual stress on the stiction shape
作者单位：State Key Laboratory of Nonlinear MechanicsInstitute of MechanicsChinese Academy of Sciences
会议名称：《中国力学大会——2013》
会议日期：2013年
学科分类：08[工学] 080104[工学-工程力学] 0815[工学-水利工程] 0801[工学-力学（可授工学、理学学位）]
摘 要：The competition between the adhesive force and the beam restoring force determines the stiction shape of a microbeam. The presence of residual stress changes the beam stiffness and thus leads to the change of the beam restoring *** study presents a model of incorporating the residual stress effect for the beam *** previous models of arc-shape and Sshape correspond to the zero residual case,which also prescribes