STUDY ON THE ABATEMENT OF CF4 BY ATMOSPHERIC MICROWAVE PLASMA AND EMISSION SPECTROSCOPY

作     者：Xie Hongduan,Sun Bing~*,Zhu Xiaomei,Liu Yongjun College of Environmental Science and Engineering,Dalian Maritime University,Post Code:116023,Dalian, China 

会议名称：《The 6th International Conference on Applied Electrostatics》

会议日期：2008年

学科分类：07[理学] 070204[理学-等离子体物理] 0702[理学-物理学] 

基　　金：supported by the National Nature Science Foundation of China (NSFC-20577004) 

关 键 词：CF4 decomposition Oxygen Microwave plasma Emission spectroscopy 

摘      要：Microwave plasma at atmospheric pressure was investigated experimentally for CF *** mechanism of CF decomposition assisting with O in plasma was investigated by emission spectra *** results indicated that destruction and removal efficiencies (DRE) of CF increased firstly and then decreased with increasing of O *** was up to 83.6%using 0.4kW of microwave power,the initial concentration of CF and O was 2000ml/m and 1000ml/m,*** results of emission spectra analysis indicated CF decomposition was highly depended on the electron collision in plasma, 0 radicals was the assistance in later reaction,to further oxidize CF to *** achieving the best DRE of CF with O as addictive gas,the most important key factor was to have optimum concentration of O in inlet *** or less O concentration was both unsuitable for CF decomposition