MULTI-PARAMETER SENSING IN LIQUID USING A LAMB WAVE BASED MICROSENSOR
作者单位：FEMTO-ST InstituteMN2S DepartmentUTBM-32 avenue de l'Observatoire25044 BesanconFrance FEMTO-ST InstituteMN2S DepartmentUTBM-32 avenue de l'Observatoire25044 BesanonFrance
会议名称：《第三届全国压电和声波理论及器件技术研讨会》
会议日期：2008年
学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程]
基 金：the French Embassy PHD Program,Hi-Tech R&D Program of China 863 Program(No.2006AA04Z358) the National Natural Science Foundation of China(No.60871043) for the financial support
关 键 词：Lamb wave sensor symmetric mode anti-symmetric multi-parameter
摘 要：The characters of zero anti-symmetric(A) and zero symmetric modes(S) of Lamb wave sensor loaded with liquid were investigated and compared in the *** was found that due to the their different acoustic penetration depths inside the liquid the changes of the surface characteristics of the sensor and the characteristics of liquid near the surface can be identified respectively by combined A and S modes *** the same time,the mass sensitivities of both A mode and S mode of a 2μm Lamb wave sensor were demonstrated *** was proved that S mode has higher sensitivity to surface mass changes and the mass sensitivity of the acoustic sensor can be improved further.