Effect of Deposition Temperature on the Structure and Mechanical Properties of Ti-6Al-4V Film
作者单位：Northwest Institute for Nonferrous Metal Research The No.2 Process Department China Petroleum Pipeline Engineering Corporation
会议名称：《中国材料大会2012》
主办单位：667
会议日期：2012年
学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）]
基 金：the Natural Science Foundation of China (Grant no 51201138)
关 键 词：Ti-6Al-4V films Microstructure Crystallographic orientation Mechanical properties.
摘 要：Ti-6Al-4V films were deposited by direct-current magnetron sputtering at different substrate temperatures. The structure and the surface morphology of the films were characterized by X-ray diffraction （XRD） and scanning electron microscopy （SEM）. The hardness and elastic moduli of Ti-6Al-4V films were measured by nanoindentation test. The results showed that the phase direction of the films deposited at room temperature was （102） orientation, and turned to almost complete （002） preferred orientation at 300℃. For a higher temperature of 500℃, the preferred orientation of the film disappeared and presented a random grain orientation. The hardness and elastic moduli of Ti-6Al-4V films obviously showed the dependence on the temperature. The relationships among temperature, microstructure and mechanical properties of Ti-6Al-4V films were discussed in this paper.