Low-frequency acoustic Fabry–Pérot fiber sensor based on a micromachined silicon nitride membrane

作     者：Zhiyuan Qu Ping Lu Yujian Li Xin Fu Wanjin Zhang Deming Liu Jiangshan Zhang 瞿致远;鲁平;李玉建;傅鑫;张万金;刘德明;张江山

作者机构：Wuhan National Laboratory for Optoelectronics(WNLO)and National Engineering Laboratory for Next Generation Internet Access SystemSchool of Optical and Electronic InformationHuazhong University of Science and TechnologyWuhan 430074China Department of Electronics and Information EngineeringHuazhong University of Science and TechnologyWuhan 430074China 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2020年第18卷第10期

页      面：19-23页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 080202[工学-机械电子工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0702[理学-物理学] 

基　　金：supported by the National Key R&D Program of China (No. 2018YFF01011800) the National Natural Science Foundation of China (No. 61775070) the Fundamental Research Funds for the Central Universities (Nos. 2017KFYXJJ032 and 2019kfyXMBZ052) 

主　　题：acoustics fiber Fabry-Perot interferometer low frequercy membrane 

摘      要：In this Letter, a low-frequency acoustic sensor based on an extrinsic Fabry–Pérot(FP) interferometer with a silicon nitride(Si3N4) membrane is demonstrated. Using micromachining techniques, the 800 nm thick Si3N4 membrane is deposited on an 8 mm × 8 mm × 400 μm silicon(Si) substrate. All the assembly procedures of the sensor are focused on the substrate to avoid any damage to the membrane itself, compared to general membrane transfer methods. The frequency response of the proposed sensor is discussed theoretically and experimentally demonstrated. The sensor exhibits an excellent flat response to the tested acoustic frequency range of 1 Hz to 250 Hz. The phase sensitivity is around-152 dB re 1 rad/μPa with sensitivity fluctuation less than 0.8 *** frequency response characteristic shows a promising potential of the sensor in low-frequency acoustic signal sensing applications.