Read-only memory disk with AgO_x super-resolution mask layer

作     者：张锋 王阳 徐文东 施宏仁 干福熹 

作者机构：Shanghai Institute of Optics and Fine Mechanics Chinese Academy of SciencesShanghai 201800 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2005年第3卷第2期

页      面：113-115页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 081201[工学-计算机系统结构] 0702[理学-物理学] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

基　　金：This work was supported by the National "863" Project of China (No. 2002AA313030)the National NaturalScience Foundation of China (No. 60207005)theScience and Technology Committee of Shanghai (No.022261045  03QG14057) 

主　　题：Atomic force microscopy Compact disks Films Masks Optical resolving power Silver compounds Spectrophotometers 

摘      要：A novel read-only memory （ROM） disk with an AgOx mask layer was proposed and studied in this letter, The AgOg, films sputtered on the premastered substrates, with pits depth of 50 nm and pits length of 380 nm, were studied by an atomic force microscopy. Tile transmittances of these AgOx films were also measured by a spectrophotometer. Disk measurement was carried out by a dynamic setup with a laser wavelength of 632.8 nm and a lens numerical aperture （NA） of 0.40. The readout resolution limit of this setup was λ/（4NA） （400 nm）. Results showed that the super-resolution readout happened only when the oxygen flow ratios were at suitable values for these disks. The best super-.resolution performance was achieved at the oxygen flow ratio of 0.5 with the smoothest fihn surface. The super-resolution readout mechanism of these ROM disks was analyzed as well.