Phosphosilicate glass film for optical waveguide by sol-gel method

作     者：SHEN Jian LI Ai-wu ZHENG Jie ZHANG Le-tian LIU Guo-fan ZHENG Wei ZHANG Yu-shu 

作者机构：National Integrated Optoelectronics Lab. Dept. of Electronics Eng. Jilin University Changchun 130012 China 

出 版 物：《Optoelectronics Letters》 (光电子快报（英文版）)

年 卷 期：2005年第1卷第2期

页      面：121-123页

学科分类：08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：This work was funded by National Emphases Basis Research andProgramming Project of China (3B8000061038) and InnovationFoundation of Jilin University (450011022214) 

主　　题：磷硅酸盐 玻璃薄膜 光学波导 生物材料 

摘      要：In this paper, silica-on-silicon erbium-doped phosphosilicate glass film material was fabricated for optical waveguides by sol-gel method. Samples were characterized and analyzed. It is demonstrated that we have got well-distributed, good translucent, alterable thickness of film and glass state erbium-doped phosphosilicate films material for optical waveguides by sol-gel method.