Resonance-mode effect on piezoelectric microcantilever performance in air,with a focus on the torsional modes

作     者：邱华诚 Dara Feili 吴学忠 Helmut Seidel Qiu Hua-Cheng;Dara Feili;Wu Xue-Zhong;Helmut Seidel;Saarland University,Chair of Micromechanics,Microfluidics/Microactuators,66123 Saarbrücken;National University of Defense Technology,College of Mechanical Engineering and Automation

作者机构：Saarland UniversityChair of MicromechanicsMicrofluidics/Microactuators66123 Saarbrücken National University of Defense TechnologyCollege of Mechanical Engineering and Automation 

出 版 物：《Chinese Physics B》 (中国物理B（英文版）)

年 卷 期：2014年第23卷第2期

页      面：481-485页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 

主　　题：microcantilever aluminum nitride torsional mode quality factor 

摘      要：A high quality factor is preferred for a microresonator sensor to improve the sensitivity and resolution. In this paper we systematically investigate the performance of the microcantilever in different resonance modes, which are the first three flexural modes, the first lateral mode, and the first and the second torsional modes. An aluminum nitride-based piezoelectric cantilever is fabricated and tested under controlled pressure from an ultra-high vacuum to a normal atmosphere, using a custom-built vacuum chamber. From the experiment results, it can be seen that the torsional modes exhibit better quality factors than those of the flexural and lateral ones. Finally, an analytical model for the air damping characteristics of the torsional mode cantilever is derived and verified by comparing with experimental results.