Acidic Polyester Imides as Thermally Stable Binder Polymers for Negative-Tone Black Photoresist
Acidic Polyester Imides as Thermally Stable Binder Polymers for Negative-Tone Black Photoresist作者机构：School of Material Science and Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan South Korea CCTech. Co. Ltd. Hwaseong South Korea Duksan Neolux Co. Ltd. Cheonan South Korea
出 版 物：《Materials Sciences and Applications》 (材料科学与应用期刊（英文）)
年 卷 期：2020年第11卷第4期
页 面：234-244页
学科分类：081704[工学-应用化学] 07[理学] 08[工学] 0817[工学-化学工程与技术] 070305[理学-高分子化学与物理] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学]
主 题：Polyester Imide One-Pot Solution Polymerization Black Photoresist Photolithography
摘 要：Polyimides are well-known for their high chemical inertness and thermal stability. However, it is usually challenging to synthesize UV-curable polyimides since the imidization reaction requires such harsh conditions that acrylate type double bonds cannot withstand. In this work, synthetic methods are developed to obtain polyester-imide type binder polymers with high thermal stability, high compatibility with the other components of the black photoresist, and fine photolithographic patterning property for the negative-tone black photoresist. The syntheses of diimide-diacid or diimide-diol intermediates for the polyesterification with dianhydride gave polyester imides which meets this requirement. The photolithographic tests have shown that the patterning of the micron-sized PDL of the organic light emitting diode (OLED) panel could be obtained. This work will interest the researchers working on the design and optimization of thermally stable binder polymers.
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