Acidic Polyester Imides as Thermally Stable Binder Polymers for Negative-Tone Black Photoresist
Acidic Polyester Imides as Thermally Stable Binder Polymers for Negative-Tone Black Photoresist作者机构:School of Material Science and Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan South Korea CCTech. Co. Ltd. Hwaseong South Korea Duksan Neolux Co. Ltd. Cheonan South Korea
出 版 物:《Materials Sciences and Applications》 (材料科学与应用期刊(英文))
年 卷 期:2020年第11卷第4期
页 面:234-244页
学科分类:081704[工学-应用化学] 07[理学] 08[工学] 0817[工学-化学工程与技术] 070305[理学-高分子化学与物理] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程(可授工学、理学学位)] 0703[理学-化学]
主 题:Polyester Imide One-Pot Solution Polymerization Black Photoresist Photolithography
摘 要:Polyimides are well-known for their high chemical inertness and thermal stability. However, it is usually challenging to synthesize UV-curable polyimides since the imidization reaction requires such harsh conditions that acrylate type double bonds cannot withstand. In this work, synthetic methods are developed to obtain polyester-imide type binder polymers with high thermal stability, high compatibility with the other components of the black photoresist, and fine photolithographic patterning property for the negative-tone black photoresist. The syntheses of diimide-diacid or diimide-diol intermediates for the polyesterification with dianhydride gave polyester imides which meets this requirement. The photolithographic tests have shown that the patterning of the micron-sized PDL of the organic light emitting diode (OLED) panel could be obtained. This work will interest the researchers working on the design and optimization of thermally stable binder polymers.