Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement

作     者：何国田 王向朝 曾爱军 唐锋 

作者机构：Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai Hengyi Optics & Fine Mechanics Co. Ltd. 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2007年第5卷第3期

页      面：164-167页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：This work was supported by National Natural Science Foundation of China (No. 60578051) International Cooperation Program of Shanghai Municipal Science & Technology Commission (No. 051107085) 

主　　题：Interferometers Phase modulation Real time systems Semiconductor lasers Signal detection 

摘      要：A sinusoidal phase-modulating （SPM） laser diode （LD） interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60 × 60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square （RMS） measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.