Investigation of E-H mode transition in magnetic-pole-enhanced inductively coupled neon-argon mixture plasma

作     者：Zahid Iqbal KHATTAK Abdul Waheed KHAN Faiq JAN Muhammad SHAFIQ Zahid Iqbal KHATTAK;Abdul Waheed KHAN;Faiq JAN;Muhammad SHAFIQ

作者机构：Department of PhysicsQuaid-i-Azam University45320 IslamabadPakistan Department of PhysicsGomal University29050 D.I.KhanPakistan Department of PhysicsGovt.Post Graduate College Nowshera24100 NowsheraPakistan 不详 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2020年第22卷第6期

页      面：110-119页

核心收录：

学科分类：081704[工学-应用化学] 08[工学] 0817[工学-化学工程与技术] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：partially supported by Quaid-i-Azam University URF for the year 2019-2020 Higher Education Commission(HEC)P.No.820 for Plasma Physics Gomal University(D I Khan) 

主　　题：Ne-Ar MaPE-ICP Langmuir probe OES electron temperature electron density mode transition 

摘      要：In this paper,E-H mode transition in magnetic-pole-enhanced inductively coupled neon-argon mixture plasma is investigated in terms of fundamental plasma parameters as a function of argon fraction(0%-100%),operating pressure(1 Pa,5 Pa,10 Pa and 50 Pa),and radio frequency(RF)power(5-100 W).An RF compensated Langmuir probe and optical emission spectroscopy are used for the diagnostics of the plasma under *** to the lower ionization potential and higher collision cross-section of argon,when its fraction in the discharge is increased,the mode transition occurs at lower RF power;*** 0%argon and1 Pa pressure,the threshold power of the E-H mode transition is 65 W,which reduces to 20 W when the argon fraction is *** electron density increases with the argon fraction at afixed pressure,whereas the temperature decreases with the argon *** relaxation length of the low-energy electrons increases,and decreases for high-energy electrons with argon fraction,due to the Ramseur ***,the relaxation length of both groups of electrons decreases with pressure due to reduction in the mean free *** electron energy probability function(EEPF)profiles are non-Maxwellian in E-mode,attributable to the nonlocal electron kinetics in this mode;however,they evolve to Maxwellian distribution when the discharge transforms to H-mode due to lower electron temperature and higher electron density in *** tail of the measured EEPFs is found to deplete in both E-and H-modes when the argon fraction in the discharge is increased,because argon has a much lower excitation potential(11.5 eV)than neon(16.6 eV).