Ultrahigh-Q silicon racetrack resonators

作     者：LONG ZHANG LANLAN JIE MING ZHANG YI WANG YIWEI XIE YAOCHENG SHI DAOXIN DAI 

作者机构：State Key Laboratory for Modern Optical InstrumentationCenter for Optical&Electromagnetic ResearchCollege of Optical Science and EngineeringInternational Research Center for Advanced PhotonicsZhejiang UniversityHangzhou 310058China Ningbo Research InstituteZhejiang UniversityNingbo 315100China 

出 版 物：《Photonics Research》 (光子学研究（英文版）)

年 卷 期：2020年第8卷第5期

页      面：684-689页

核心收录：

学科分类：080904[工学-电磁场与微波技术] 0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：National Major Research and Development Program(2018YFB2200200) China National Funds for Distinguished Young Scientists(61725503) National Natural Science Foundation of China(6191101294,91950205) Natural Science Foundation of Zhejiang Province(LD19F050001,LZ18F050001) 

主　　题：resonator waveguide mode 

摘      要：An ultrahigh-Q silicon racetrack resonator is proposed and demonstrated with uniform multimode silicon photonic *** consists of two multimode straight waveguides connected by two multimode waveguide bends(MWBs).In particular,the MWBs are based on modified Euler curves,and a bent directional coupler is used to achieve the selective mode coupling for the fundamental mode and not exciting the higher-order mode in the *** this way,the fundamental mode is excited and propagates in the multimode racetrack resonator with ultralow loss and low intermode ***,it helps achieve a compact 180°bend to make a compact resonator with a maximized free spectral range(FSR).In this paper,for the chosen 1.6μm wide silicon photonic waveguide,the effective radius Reffof the designed 180°bend is as small as 29μ*** corresponding FSR is about 0.9 nm when choosing 260μm long straight waveguides in the *** present high-Q resonator is realized with a simple standard single-etching process provided by a multiproject wafer *** fabricated device,which has a measured intrinsic Q-factor as high as 2.3×10~6,is the smallest silicon resonator with a106Q-factor.