Nanodot array deposition via single shot laser interference pattern using laser-induced forward transfer

作     者：Yoshiki Nakata Eiki Hayashi Koji Tsubakimoto Noriaki Miyanaga Aiko Narazaki Tatsuya Shoji Yasuyuki Tsuboi Yoshiki Nakata;Eiki Hayashi;Koji Tsubakimoto;Noriaki Miyanaga;Aiko Narazaki;Tatsuya Shoji;Yasuyuki Tsuboi

作者机构：Institute of Laser EngineeringOsaka University2-6 YamadaokaSuitaOsaka 565-0871Japan Institute for Laser Technology1-8-4 Utsubo-honmachiNishi-kuOsaka 550-0004Japan National Institute of Advanced Industrial Science and TechnologyChuo 21-1-1 UmezonoTsukubaIbaraki 305-8568Japan Department of ChemistryOsaka City University3-3-138SugimotoSumiyoshi-kuOsaka 558-8585Japan 

出 版 物：《International Journal of Extreme Manufacturing》 (极端制造（英文）)

年 卷 期：2020年第2卷第2期

页      面：114-118页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 08[工学] 070205[理学-凝聚态物理] 0817[工学-化学工程与技术] 0807[工学-动力工程及工程热物理] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0803[工学-光学工程] 0811[工学-控制科学与工程] 0702[理学-物理学] 

基　　金：the Japan Society for the Promotion of Science(JSPS)through a Grant-in-Aid for Scientific Research(B)(No.16H038850) Amada Foundation for Metal Work Technology(AF-2018212) 

主　　题：interference laser processing laser-induced dot transfer nanodot array femtosecond laser solid-liquid-solid mechanism Au 

摘      要：Laser-induced forward transfer(LIFT)is a direct-writing technique capable of depositing a single dot smaller than the laser wavelength at small shot energy through the laser-induced dot transfer(LIDT)*** deposit a single nanodot in a single shot of laser irradiation,a liquid nanodrop is transferred from donor to receiver and finally solidified via a solid–liquid–solid(SLS)*** conventional LIDT experiments,multi-shots with step scanning have been used to form array ***,interference laser processing can achieve an arrayed process and generate a periodic structure in a single *** this study,a femtosecond laser interference pattern was first applied to LIDT,and an array of nanodots was successfully deposited in a single shot,producing the following unit structures:a single dot,adjoining dots,and stacking *** diameter of the smallest nanodot was 355 nm,and the narrowest gap between two adjoining nanodots was 17.2 *** LIDT technique produces high-purity,catalyst-free that do not require post-cleaning or alignment *** these significant advantages,LIDT can expand the usability of nanodots in a wide range of fields.