High-power hybrid GaN-based green laser diodes with ITO cladding layer

作     者：LEI HU XIAOYU REN JIANPING LIU AIQIN TIAN LINGRONG JIANG SIYI HUANG WEI ZHOU LIQUN ZHANG HUI YANG 

作者机构：Key Laboratory of Nanodevices and ApplicationsSuzhou Institute of Nano-Tech and Nano-BionicsChinese Academy of Sciences(CAS)Suzhou 215123China School of Nano-Tech and Nano-BionicsUniversity of Science and Technology of ChinaHefei 230026China 

出 版 物：《Photonics Research》 (光子学研究（英文版）)

年 卷 期：2020年第8卷第3期

页      面：279-285页

核心收录：

学科分类：08[工学] 0803[工学-光学工程] 

基　　金：National Key Research and Development Program of China(2016YFB0401803,2017YFE0131500,2017YFB0405000) National Natural Science Foundation of China(61834008,61574160,61804164,61704184) Natural Science Foundation of Jiangsu province(BK20180254) China Postdoctoral Science Foundation(2018M630619) We are thankful for the technicalsupport from Nano Fabrication Facility, Platform forCharacterization & Test, and Nano-X of SINANO, CAS 

主　　题：diodes power laser 

摘      要：Green laser diodes(LDs)still perform worst among the visible and near-infrared spectrum range,which is called thegreen gap.Poor performance of green LDs is mainly related to the p-type Al Ga N cladding layer,which on one hand imposes large thermal budget on In Ga N quantum wells(QWs)during epitaxial growth,and on the other hand has poor electrical property especially when low growth temperature has to be *** demonstrate in this work that a hybrid LD structure with an indium tin oxide(ITO)p-cladding layer can achieve threshold current density as low as 1.6 k A∕cm^2,which is only one third of that of the conventional LD *** improvement is attributed to two benefits that are enabled by the ITO cladding *** is the reduced thermal budget imposed on QWs by reducing p-Al Ga N layer thickness,and the other is the increasing hole concentration since a low Al content p-Al Ga N cladding layer can be used in hybrid LD ***,the slope efficiency is increased by 25%and the operation voltage is reduced by 0.6 V for hybrid green *** a result,a 400 m W high-power green LD has been *** results indicate that a hybrid LD structure can pave the way toward high-performance green LDs.