Nanoindentation analysis of TiN,TiAlN,and TiAlSiN coatings prepared by cathode ion plating

作     者：KONG DeJun FU GuiZhong 

作者机构：College of Mechanical EngineeringChangzhou University Jiangsu Key Laboratory of Materials Surface Science and TechnologyChangzhou University 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：2015年第58卷第8期

页      面：1360-1368页

核心收录：

学科分类：081702[工学-化学工艺] 08[工学] 0817[工学-化学工程与技术] 

基　　金：supported by the Jiangsu Province Science and Technology Support Program(Industry)(Grant No.BE2014818) 

主　　题：TiN TiAIN and TiAISiN coatings nanoindentation creep hardness elasticity modulus plastic deformation energy 

摘      要：The TiN, TiA1N and TiA1SiN coatings were deposited on H13 hot-worked mold steel by cathodic arc ion plating （CAIP）. The morphologies, phase compositions, and nanoindcntation parameters, such as creep hardness, elastic modulus and plastic de- formation energy of the coatings were analyzed with field emission scanning electron microscopy （FESEM）, X-ray diffraction （XRD） and nanoindentation testing, respectively, and the test results were compared with equation describing the indentation model. The results show that the TiN, TiA1N and TiAISiN coating surfaces were dense and composed of TiN, TiN ＋ TiA1N, TiN ＋ Si3N4 ＋ TiAIN phases, respectively. There was no spalling or cracking on the indentation surface. The creep hardness of the TiN, TiA1N and TiAISiN coatings was 7.33, 13.5, and 15.2 GPa, respectively; the corresponding hardness measured by nanoindentation was 7.09, 15.6, and 21.7 GPa, respectively; and the corresponding elastic modulus was 201.93, 172.79, and 162.77 GPa, respectively. The contact depth and elastic modulus calculated by the indentation model were close to those of the test results, but the remaining indentation parameters showed discrepancies. The sequence of plastic deformation energy was TiN 〉 TiA1N〉TiAISiN.