Laser wavelength effects on(Ti,Al,Si)N in near-field laser nanostructuring by micron optical fiber enhanced irradiation
Laser wavelength effects on(Ti,Al,Si)N in near-field laser nanostructuring by micron optical fiber enhanced irradiation作者机构：State Key Laboratory of Tribology Tsinghua University
出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)
年 卷 期：2013年第56卷第12期
页 面：3012-3016页
核心收录：
学科分类：080503[工学-材料加工工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）]
基 金：supported by the National Natural Science Foundation of China(Grant Nos.90923018 51105222)
主 题：micro-fiber field enhancement nano-optics nanostructuring
摘 要：The effects of laser wavelengths(1064,532,355 and 266 nm)on nano-processing of fabricating a groove structure on(Ti,Al,Si)N alloy film using the micro-fiber near-field enhanced irradiation are *** is observed that variations of laser wavelength can effectively change the widths of the groove structures,which are featured as one-dimension bowl-like *** minimum of the groove width can be achieved at 293 nm with a 532 nm laser *** order to fabricate the groove in nanoscale,enough energy is delivered onto(Ti,Al,Si)N surface by a single laser *** results are also discussed to understand the experimental results.
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