Fabrication of single-walled carbon nanotube-based highly sensitive gas sensors

作     者：XU Ke TIAN XiaoJun WU ChengDong LIU Jian LI MengXin SUN Ying WEI FaNan 

作者机构：School of Information & Control EngineeringShenyang Jianzhu University State Key Laboratory of RoboticsShenyang Institute of AutomationChinese Academy of Sciences School of Information Science and EngineeringNortheastern University 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：2013年第56卷第1期

页      面：32-35页

核心收录：

学科分类：07[理学] 080202[工学-机械电子工程] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0702[理学-物理学] 

基　　金：supported by the National Natural Science Foundation of China (Grant No. 51005230) the Education Department of Liaoning Province Science and Technology Research Projects (Grant No.L2012213) 

主　　题：single-walled carbon nanotube field effect transistor assembly dielectrophoresis ammonia gas sensor 

摘      要：A highly sensitive single-walled carbon nanotube(SWCNT)-based ammonia(NH3) gas detector is manufactured by orderly assembling SWCNT using the dielectrophoretical(DEP) *** force microscopy(AFM) and scanning electron microscopy(SEM) images revealed that SWCNTs were assembled between the *** were affected by the electrophoretic force which was carried out by the related theoretical analysis in a nonuniform electric *** SWCNT field effect transistors geometry was *** electrical performance of NH3 gas sensor with the SWCNT field effect transistors geometry was tested before and after the adoption of NH3 at room *** results indicated that the efficient assembly of SWCNT was obtained by the applied alternating current voltage with frequency of 2 MHz and amplitude of 10 *** SWCNTs-based gas sensor had high sensitivity to NH3,and the electrical conductance of NH3 gas sensor reduced two times after interaction with *** SWCNTs surface gas molecules were removed by means of ultraviolet ray irradiation for 10 ***,the fabricated NH3 gas sensor could be *** is a clear evidence that the adsorption of NH3 on the SWCNT channel is easy to be *** theoretical results are consistent with recent experiments.