Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

作     者：虞一青 辛煜 宁兆元 

作者机构：Key Laboratory of Thin FilmsSchool of Physical Science and TechnologySoochow University 

出 版 物：《Chinese Physics B》 (中国物理B（英文版）)

年 卷 期：2011年第20卷第1期

页      面：486-492页

核心收录：

学科分类：07[理学] 070204[理学-等离子体物理] 0702[理学-物理学] 

基　　金：Project supported by the National Natural Science Foundation of China(Grant Nos.10635010 and 10775103) 

主　　题：capacitively coupled plasma collisional-radiative model optical emission spectroscopy Langmuir probe 

摘      要：This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered in this model, electron-impact excitation and the spontaneous radiative decay. The diffusion loss term, which is found to be important for the two metastable states （4s[3/2]2, 4s＇[1/2]0）, is also taken into account. Behaviours of representative metastable and radiative states are discussed. Two emission lines （located at 696.5 nm and 750.4 nm） are selected and intensities are measured to obtain populated densities of the corresponding radiative states in the argon plasma. The calculated results agree well with that measured by Langmuir probe, indicating that the current model combined with optical emission spectroscopy is a candidate tool for electron density and temperature measurement in radio frequency capacitively coupled discharges.