A selective area growth double stack active layer electroabsorption modulator integrated with a distributed feedback laser

作     者：ZHU HongLiang LIANG Song ZHAO Ling Juan KONG DuanHua ZHU NingHua WANG Wei 

作者机构：Key Laboratory of Semiconductor Materials Institute of Semiconductor Chinese Academy of Sciences Beijing 100083 China 

出 版 物：《Chinese Science Bulletin》 (Chin. Sci. Bull.)

年 卷 期：2009年第54卷第20期

页      面：3627-3632页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：Supported by the National High-Tech Research and Development Program of China (Grant Nos.2001AA312050 2005AA31g060 and 2007AA-03Z417) 

主　　题：分布反馈激光器 电吸收调制器 选择区域生长 有源层 集成 堆积 EML 制备方法 

摘      要：A new method for fabricating electroabsorption modulator integrated with a distributed feedback laser(EML) was *** the method we fabricated a selective area growth double stack active layer EML(SAG-DSAL-EML).Through comparing with other fabrication methods of EMLs,the characters and the merits of the new method presented in this paper were discussed.