Structural and mechanical properties of nano-crystal TiN coatings

作     者：ZHANG Chenhui PAN Guoshun LUO Jianbin LI Wenzhi CHEN Darong 

作者机构：State Key Laboratory of Tribology Tsinghua University Beijing 100084 China State Key Laboratory of Tribology Tsinghua University Beijing 100084 China State Key Laboratory of Tribology Tsinghua University Beijing 100084 China State Key Laboratory of Tribology Tsinghua University Beijing 100084 China State Key Laboratory of Tribology Tsinghua University Beijing 100084 China 

出 版 物：《Science China(Physics,Mechanics & Astronomy)》 (中国科学：物理学、力学、天文学（英文版）)

年 卷 期：2004年第47卷第Z1期

页      面：1-7页

核心收录：

学科分类：07[理学] 08[工学] 0702[理学-物理学] 

基　　金：This work was supported by the National Natural Science Foundation of China(Grant No.90206022) the Fund for Outstanding Youth,China(Grant No.50025515) 

主　　题：TiN, nano-crystal, microstructure, hardness, grain-boundary triple junctions. 

摘      要：The structural and mechanical properties of TiN coatings prepared by ion beam assisted deposition (IBAD) were studied. The coatings have a polycrystal structure with grain size of ～10 nm or less. The hardness of the coatings increases with increasing grain size of TiN crystallites. The coating with grain size of 10.3 nm even has a superhardness of 44.7GPa. The relationship between the hardness and the grain size in the nano-crystalline coatings was discussed on the basis of grain-boundary triple junctions.