Diffractive Multi-beam Ultra-fast Laser Micro-processing Using a Spatial Light Modulator(Invited Paper)

作     者：Walter Perrie S. P. Edwardson E. Fearon G. Dearden K. G. Watkins 

作者机构：Laser GroupDepartment of EngineeringUniversity of LiverpoolBrownlow Street 

出 版 物：《中国激光》 (Chinese Journal of Lasers)

年 卷 期：2009年第36卷第12期

页      面：3093-3115页

核心收录：

学科分类：0810[工学-信息与通信工程] 08[工学] 081002[工学-信号与信息处理] 0803[工学-光学工程] 

主　　题：多波束超快速激光 数字处理 光学系统 傅里叶平面 

摘      要：Multi-beam ultra-fast laser parallel microprocessing using spatial light modulation is demonstrated in this *** multi-beam patterns are generated with a spatial light modulator(SLM),which is driven by computer generated holograms(CGHs).The CGHs calculated by appropriate algorithms are displayed on the SLM to split an input laser beam to a number of beamlets and digitally manipulate their positions and *** undesired damage by the energetic zero order beam can be avoided by either installing a 4f optical system to block the zero order at the Fourier plane or adding a Fresnel zone lens on the CGH to defocus the zero order at the processing *** surface ablation of materials using multi-beam patterns synchronised with a scanning galvanometer system shows flexible and high throughput parallel *** tightly focusing the diffractive beams with an objective into transparent materials,high speed dynamic femto-second laser two-dimensional(2D) and three-dimensional(3D) internal structuring is also *** results demonstrate the high precision micro-processing with higher efficiency,showing the potential for ultra-fast laser parallel processing in real industrial applications.