The geometric resistivity correction factor for several geometrical samples

作     者：Serdar Yilmaz 

作者机构：Mersin University Science and Arts Faculty Physics Department Mersin University Advanced Technology Education Research and Application Center 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2015年第36卷第8期

页      面：1-8页

核心收录：

学科分类：080802[工学-电力系统及其自动化] 0808[工学-电气工程] 08[工学] 

主　　题：semiconductor four point probe conductivity measurement resistivity correction factor 

摘      要：This paper reviews the geometric resistivity correction factor of the 4-point probe DC electrical conduc- tivity measurement method using several geometrical samples. During the review of the literature, only the articles that include the effect of geometry on resistivity calculation were considered. Combinations of equations used for various geometries were also given. Mathematical equations were given in the text without details. Expressions for the most commonly used geometries were presented in a table for easy reference.