Fabrication and characterization of annealed proton exchanged long period waveguide grating in x-cut LiNbO3

作     者：ZHANG Ai-ling GENG Bo HAO Li-yue LI Dan 张爱玲;耿博;郝立悦;李丹

作者机构：Tianjin Key Laboratory of Film Electronic and Communication Devices Engineering Research Center of Ministry of Education for Optoelectronic Devices and Communication Technology School of Electrical and Electronic EngineeringTianjin University of Technology 

出 版 物：《Optoelectronics Letters》 (光电子快报（英文版）)

年 卷 期：2019年第15卷第4期

页      面：260-263页

核心收录：

学科分类：0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 

基　　金：supported by the National Natural Science Foundation of China(No.61377075) the New Century Excellent Talents in University(No.NCET-07-0611) the Training Program for Leading Talents of Universities in Tianjin 

主　　题：optical spectrum analyzer(OSA) charge-coupled device(CCD) x-cut LiNbO3 

摘      要：In this paper, a long-period waveguide grating was fabricated in x-cut lithium niobate substrate by patterned annealed proton exchange waveguide fabrication process. The waveguide mode characteristic was evaluated using a charge-coupled device(CCD) camera. It shows that the waveguide is single mode transmission at a wavelength of1 550 nm. The transmission spectra of the long period waveguide gratings were measured by optical spectrum analyzer(OSA) and show an extinction ratio of ~17 dB and a 3 dB bandwidth of ~10 nm at the resonant wavelength. The resonant wavelength moves toward to the long wavelength direction as the waveguide width-difference increases in the same period, and also shifts toward to the long wavelength direction with the increase of the period in the case of the same waveguide width-difference. The method of fabricating a long period waveguide grating based on a patterned annealed proton exchange technique simplifies the fabrication process, and at the same time, reduces the fabrication cost.