A Hybrid Silicon-PDMS Micropump Actuated by PZT Bimorph

作     者：Haining Wang Dafu Cui Zhaoxin Geng Xing Chen 

作者机构：State Key Lab. of Transducer Tech. Inst. of Electronics Chinese Academy of Sciences Beijing 100080 China 

出 版 物：《稀有金属材料与工程》 (Rare Metal Materials and Engineering)

年 卷 期：2006年第35卷第A3期

页      面：319-320页

核心收录：

学科分类：0806[工学-冶金工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：The authors greatly acknowledge the financial support from the National Science Foundation of China (Grant number 20299030  60427001 and 60501020) 

主　　题：micropump PZT bimorph PDMS 

摘      要：The fabrication and characterization of a hybrid Silicon-PDMS micropump based on MEMS technology is presented. The micropump consists of one chamber,two passive valves and one PDMS diaphragm.A PZT bimorph working as the actuator is mounted on the PDMS *** use of the PDMS diaphragm and the PZT bimorph can give rise to large displacements of the pump diaphragm,making the micropump more efficient and easier to be *** flow rate of the micropump is a function to the voltage and frequency of the applied square *** a square wave of 100V is applied,a maximum flow rate of 317μL/min and a back-pressure of 2 kPa are achieved at 20 Hz.