Computational study on influence of RF shielding box on inductance of coil

作     者：S J KIM J J LEE Y S LEE J H KIM S J YOU 

作者机构：Applied Physics lab for PLasma Engineering(APPLE) Department of Physics Chungnam National University Daejeon 34134 Republic of Korea Korea Research Institute of Standards and Science(KRISS) Daejeon 34113 Republic of Korea 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2019年第21卷第6期

页      面：23-28页

核心收录：

学科分类：08[工学] 0827[工学-核科学与技术] 

基　　金：supported by the MOTIE (Ministry of Trade, Industry & Energy ) supported by the MOTIE (Ministry of Trade, Industry & Energy) KSRC (Korea Semiconductor Research Consortium) supported program for the development of the future semiconductor device by the Ministry of Science, ICT and Future Planning by the Korea Research Institute of Standards and Science by the National Research Council of Science & Technology (NST) granted by the Korea government (MSIP) the Ministry of Trade, Industry & Energy (MOTIE) of the Republic of Korea by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) 

主　　题：3D full EM wave simulation RF matching component RF shield inductive and capacitive coupling 

摘      要：Despite the fact that a radio frequency (RF) shielding box affects a coil inductance used in matching network,RF engineers have used a coil inductance measured in open space on designing matching networks since it is difficult to precisely measure the coil inductance within the RF shielding *** this work,we investigate the influences of the RF shielding box on the coil inductance via a 3D full electromagnetic wave *** results shows that the coil inductance decreases from-6.0% to-11.9% compared with its ideal inductance depending on coil positions within the RF shielding *** inductive and capacitive coupling between the coil and surfaces of the RF shielding box contribute to the reduction of the coil *** expect that these results would be useful for those who design RF matching networks.