Aluminium phthalocyanine chloride thin films for temperature sensing

作     者：Muhammad Tariq Saeed Chani Abdullah M.Asiri Kh.S.Karimov Atif Khan Niaz Sher Bhadar Khan Khalid.A.Alamry 

作者机构：Center of Excellence for Advanced Materials Research King Abdulaziz University Department of Chemistry Faculty of Science King Abdulaziz University GIK Institute of Engineering Sciences and Technology Physical Technical Institute Aini St. 299/1 

出 版 物：《Chinese Physics B》 (中国物理B（英文版）)

年 卷 期：2013年第22卷第11期

页      面：629-633页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0704[理学-天文学] 

基　　金：Project supported by the Center of Excellence for Advanced Materials Research(CEAMR) King Abdulaziz University,Jeddah(Grant No.CEAMR-434-03) 

主　　题：temperature sensor thin films annealing aluminium phthalocyanine chloride 

摘      要：This study presents the fabrication and temperature sensing properties of sensors based on aluminium phthalocyanine chloride （AlPcCl） thin films. To fabricate the sensors, 50-nm-thick electrodes with 50-μ gaps between them are deposited on glass substrates. AlPcCl thin films with thickness of 50–100 nm are deposited in the gap between electrodes by thermal evaporation. The resistance of the sensors decreases with increasing thickness and the annealing at 100 ℃ results in an increase in the initial resistance of sensors up to 24%. The sensing mechanism is based on the change in resistance with temperature. For temperature varying from 25 ℃ to 80 ℃, the change in resistance is up to 60%. Simulation is carried out and results obtained coincide with experimental data with an error of ±1%.