Preparation of Electrode Array by Electrochemical Etching Based on FEM

作     者：Minghuan WANG Di ZHU Lei WANG 

作者机构：The MOE Key laboratory of Mechanical Manufacture and Automation Zhejiang University of Technology Hangzhou 310032 China College of Mechanical and Electrical Engineering Nanjing Aeronautics and Astronautics Nanjing 210016 China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2008年第24卷第6期

页      面：845-849页

核心收录：

学科分类：081704[工学-应用化学] 08[工学] 0817[工学-化学工程与技术] 

基　　金：the financial support from China Aviation Science Foundation (04H52055) 

主　　题：Electrode array Electrochemical etching Finite element method (FEM) Micro-electrodes 

摘      要：Process technology of multiple cylindrical micro-pins by wire-electrical discharge machining （wire-EDM） and electrochemical etching was presented. A row of rectangular micro-columns were machined by wire-EDM and then machined into cylindrical shape by electrochemical etching. However, the shape of the multiple electrodes and the consistent sizes of the electrodes row are not easy to be controlled. In the electrochemical process, the shape of the cathode electrode determines the current density distribution on the anode and so the forming of multiple electrodes. This paper proposes a finite element method （FEM） to accurately optimize the electrode profile. The microelectrodes row with uniformity diameters with size from hundreds micrometers to several decades could be fabricated, and mathematical model controlling the shape and diameter of multiple microelectrodes was provided. Furthermore, a good agreement between experimental and theoretical results was confirmed.