Gas flow characteristics in straight silicon microchannels

作     者：丁英涛 姚朝晖 等 

作者机构：DepartmentofEngineeringMechanicsTsinghuaUniversityBeijing100084China 

出 版 物：《Chinese Physics B》 (中国物理B（英文版）)

年 卷 期：2002年第11卷第9期

页      面：869-875页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 

基　　金：the Foundation of the Ministry of Education of China for Returned Scholars  the Foundation of the Chinese'985' Project  and the Foundation of the Tsinghua Micro/Nano Technical Center 

主　　题：gas flow friction coefficient rectangular model compressibility 

摘      要：Experiments have been conducted to investigate nitrogen gas flow characteristics through four trapezoidal silicon microchannels with different hydraulic diameters. The volume flow rate and pressure ratio are measured in the experiments. It is found that the friction coefficient is no longer a constant, which is different from the conventional theory. The characteristics are first explained by the theoretical analysis. A simplified rectangular model (rectangular straight channel model) is then proposed. The experimental results are compared with the theoretical predictions based on the simplified rectangular model and the two-dimensional flow between the parallel-plate model which was usually used. The difference between the experimental data and the theoretical predictions is found in the high-pressure ratio cases. The influence of the gas compressibility effect based on the Boltzmann gas kinetic analysis method is studied to interpret the discrepancy. We discuss two important factors affecting the application extent of different prediction models.