Nitrogen Contents on Tribological Properties of Magnetron Sputtered SICN Coatings

作     者：TIETUNSUN Y.Q.FU J.WEI H.J.DU 

作者机构：DepartmentofphysicsShanghaiJiaotongUniversityShanghaiChina／／SchoolofMechanicalandProductionEngineeringNanyangTechnologicalUniversitySingapore639798 SchoolofMechanicalandProductionEngineeringNanyangTechnologicalUniversitySingapore639798／／SingaporeInstituteofManufacturingTechnologySingapore71NanyangDriveSingapore638075 SingaporeInstituteofManufacturingTechnology-Singapore71NanyangDrivesingapore638075 

出 版 物：《材料热处理学报》 (Transactions of Materials and Heat Treatment)

年 卷 期：2004年第25卷第05B期

页      面：854-857页

核心收录：

学科分类：080503[工学-材料加工工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

主　　题：SiCN涂层 磁控管溅射 含氮量 硬度 磨损 

摘      要：Silicon carbonitride (SiCN) coatings were deposited on silicon and tungsten carbide substrates by co-sputtering silicon and carbon in argon and nitrogen mixture atmosphere using magnetron-sputtering system. The effect of the N2 concentration, RF substrate bias voltage and target current on film deposition rate, roughness, adhesion, mechanical and tribological properties of coatings were investigated. The deposition rate was found to increase with the increasing nitrogen concentration. X-ray photoelectron spectroscopy analysis showed that high nitrogen concentration in the nitrogen-argon gas mixture enhanced the incorporation of C and N but reduced the incorporation of Si. SiCN coatings have good tribological properties at a N2 concentration of approximately 60%.