Stick-Slip Tower-Shaped Piezoelectric Actuator

作     者：陈乾伟 鞠全勇 黄卫清 时运来 

作者机构：School of Mechatronic EngineeringJinling Institute of Technology State Key Laboratory of Mechanics and Control of Mechanical Structures Nanjing University of Aeronautics and Astronautics 

出 版 物：《Transactions of Nanjing University of Aeronautics and Astronautics》 (南京航空航天大学学报（英文版）)

年 卷 期：2015年第32卷第2期

页      面：156-162页

核心收录：

学科分类：080801[工学-电机与电器] 0808[工学-电气工程] 08[工学] 

基　　金：supported by the Natural Science Foundation of China(Nos.51375224,51275235) the Re-search Fund for Young Teachers of Jinling Institute of Technology(No.Jit-b-201318) 

主　　题：piezoelectric actuator stick-slip sawtooth stepping 

摘      要：Since stick-slip actuators present the advantage of allowing long displacements(several centimeters or even more)at a high speed with an ultra high resolution(5nm),a new type of stick-slip piezoelectric actuator is proposed to attain sub-nanometer positioning *** actuator is composed of a slider and a tower-shaped stator using forced bending vibration in y-z plane to generate tangential vibration on the top of the driving *** excited by the sawtooth input voltage,driving foot of the stator is able to generate a tangential asymmetrical vibration on the top,and the slider is thus pushed to move.A prototype and its testing equipment are fabricated and *** that,the testing of vibration mode and mechanical characteristics as well as stepping characteristics are *** results show that under the condition that the sawtooth input voltage is400VP-Pand the pre-pressure is *** of the actuator reaches its maximum 1.2mm/s at the frequency of 8000 Hz and drops to its minimum 35nm/s at the frequency of *** the excitation signal is the single-phase sawtooth stepping signal,the tower-shaped actuator can directionally move forward or backward step by *** when excited by the sawtooth stepping signal with 1Hz and 300VP-Pduring 1cycle(200ms),the actuator has a minimum stepping distance of 22 nm.