Matrix-assisted pulsed laser evaporation of polyimide thin films and the XPS study

作     者：WANG Wei LI ChengXiang ZHANG GuoBin SHENG LiuSi 

作者机构：National Synchrotron Radiation LaboratoryUniversity of Science and Technology of ChinaHefei 230029China School of Chemistry and Chemical EngineeringShihezi UniversityShihezi 832003China 

出 版 物：《Science China Chemistry》 (中国科学（化学英文版）)

年 卷 期：2008年第51卷第10期

页      面：983-989页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：the National Natural Science Foundation of China (Grant No. 10575099) 

主　　题：MAPLE polyimide thin films XPS single-photon effect multi-photon effect 

摘      要：Compared with the traditional thin film techniques, the matrix-assisted pulsed laser evaporation (MAPLE) technique has many advantages in the deposition of polymer and organic thin films. It has a wide range of applications in many fields, such as non-linear optics, luminescent devices, electronics, various sensors. We have successfully deposited polyimide thin films by using the MAPLE technique. These films were characterized with XPS. The XPS spectra showed that the single-photon effect is ob-vious at low laser fluence and the chemical bonds will be broken, resulting in decomposition of the films. Contrarily, the single-photon effect will decrease and the multi-photon effect and the photothermal effect will increase at high laser fluence, resulting in the protection of the structure of the polyimide thin films and the obvious decrease in decomposition. High laser fluence is more suitable for the deposition of polymer and organic thin films than low laser fluence.