The theory and experiment of very-long-wavelength 256×1 GaAs/Al_(x)Ga_(1-x)As quantum well infrared detector linear arrays

作     者：GUO FangMin LI Ning XIONG DaYuan ZHEN HongLou XU XiangYan HOU Ying DING RuiJun LU Wei HUANG Qi ZHOU JunMing 

作者机构：National Laboratory for Infrared PhysicsShanghai Institute of Technical PhysicsChinese Academy of SciencesShanghai 200083China Institute of PhysicsChinese Academy of SciencesBeijing 100080China 

出 版 物：《Science China(Physics,Mechanics & Astronomy)》 (中国科学：物理学、力学、天文学（英文版）)

年 卷 期：2008年第51卷第7期

页      面：805-812页

核心收录：

学科分类：07[理学] 0809[工学-电子科学与技术（可授工学、理学学位）] 070205[理学-凝聚态物理] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0704[理学-天文学] 0702[理学-物理学] 

基　　金：the National Natural Science Foundation of China(Grant No.10374095) 

主　　题：quantum well focal plane arrays very long wavelength infrared detector diffraction grating 

摘      要：The 256×1 linear array of multiple quantum wells infrared photodetector (QWIP) is designed and fabricated for the peak response wavelength at λP=14.6 μm. The response spectral width is bigger than 2.2 μm. The two-dimensional (2D) diffractive coupling grating has been formed on the top QWIP photosensitive pixel for coupling the infrared radiation to the infrared detective layers. The performance of the device at VB=3 V and T=45 K has the responsibility 4.28×10-2 (A/W), the blackbody detectivity Db*=5.14×109 (cm·Hz1/2/W), and the peak detectivity Dλ*=4.24× 1010 (cm·Hz1/2/W). The sensor pixels are connected with CMOS read out circuit (ROC) hybridization by indium bumps. When integral time is 100 μs, the linear array has the effective pixel of QWIP FPA Nef of 99.2%, the average responsibility  (V/W) of 3.48×106 (V/W), the average peak detectivity Dλ* of 8.29×109 (cm·Hz1/2/W), and the non-uniformity UR of 5.83%. This device is ready for the thermal image application.