The Gas Nucleation Process Study of Anatase TiO_2 in Atmospheric Non-Thermal Plasma Enhanced Chemical Vapor Deposition

作     者：吴茂水 徐雨 戴林君 王恬恬 李雪 王德信 郭颖 丁可 黄晓江 石建军 张菁 

作者机构：Department of Applied PhysicsDonghua University College of Material ScienceDonghua University Member of Magnetic Confinement Fusion Research CenterMinistry of EducationDonghua University 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2014年第16卷第1期

页      面：32-36页

核心收录：

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：supported by National Natural Science Foundation of China(Nos.10835004 10775031 and 11375042) Shanghai Municipal Committee of Science and Technology of China(10XD1400100) Outstanding Young Investigator Award(No.11005017) 

主　　题：gas phase nucleation TiO2 nanoparticles plasma enhanced chemical vapordeposition (PECVD) 3D nanostructured films atmospheric pressure 

摘      要：Abstract The gas phase nucleation process of anatase TiO2 in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at different power density were collected outside of the reactor. The structure of the collected particles has been investigated by field scanning electron microscope （FESEM）, X-ray diffraction （XRD）, high resolution transmission electron microscopy （HRTEM） and selected area electron diffraction （SAED）. The analysis shows that uniform crystalline nuclei with average size of several nanometers have been formed in the scale of micro second through this reactive atmo- spheric plasma gas process. The crystallinity of the nanoparticles increases with power density. The high density of crystalline nanonuclei in the plasma gas phase and the low gas temperature are beneficial to the fast deposition of the 3D porous anatase TiO2 film.