咨询与建议

看过本文的还看了

相关文献

该作者的其他文献

文献详情 >Microwave CVD Thick Diamond Fi... 收藏

Microwave CVD Thick Diamond Film Synthesis Using CH4/H2/H2O Gas Mixtures

Microwave CVD Thick Diamond Film Synthesis Using CH_4/H_2/H_2O Gas Mixtures

作     者:满卫东 汪建华 王传新 马志斌 王升高 熊礼威 

作者机构:Hubei Provincial Key Laboratory of Plasma Chemistry & Advanced MaterialsWuhan Institute of Technology Wuhan 430073 China Institute of Plasma Physics Chinese Academy of Sciences Hefei 230031 China Hubei Provincial Key Laboratory of Plasma Chemistry & Advanced Materials Wuhan Institute of Technology Wuhan 430073 China Hubei Provincial Key Laboratory of Plasma Chemistry & Advanced Materials Wuhan Institute of Technology Wuhan 430073 China Institute of Plasma Physics Chinese Academy of Sciences Hefei 230031 China 

出 版 物:《Plasma Science and Technology》 (等离子体科学和技术(英文版))

年 卷 期:2006年第8卷第3期

页      面:329-332页

核心收录:

学科分类:08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程(可授工学、理学学位)] 

基  金:Hubei Province Science and Technology Department with a Grant No. 2002AA105A02) the Team of Innovation of Hubei Province Education Department (2004) partly by the National Natural Science Foundation of China with a Grant No. 50572075 

主  题:diamond film microwave Raman spectroscopy water 

摘      要:Thick diamond films with a thickness of up to 1.2 mm and a area of 20 cm^2 have been grown in a homemade 5 kW microwave plasma chemical vapor deposition (MPCVD) reactor using CH4/H2/H2O gas mixtures. The growth rate, radial profiles of the film thickness, diamond morphology and quality were evaluated with a range of parameters such as the substrate temperature of 700℃ to 1100℃, the fed gas composition CH4/H2 = 3.0%, H2O/H2 = 0.0%,-2.4%. They were characterized by scanning electron microscopy and Raman spectroscopy. Translucent diamond wafers have been produced without any sign of non-diamond carbon phases, Raman peak as narrow as 4.1 cm^-1. An interesting type of diamond growth instability under certain deposition conditions was observed in a form of accelerated growth of selected diamond crystallites of a very big lateral size, about 1 mm, and of a better structure compared to the rest of the film.

读者评论 与其他读者分享你的观点