A new method for measuring laser beam straightness error based on common-path compensation

作     者：由凤玲 冯其波 张斌 翟玉生 曹睿 方恒楚 

作者机构：Key Laboratory of Luminescence and Optical Information of Ministry of Education Beijing Jiaotong University 

出 版 物：《Optoelectronics Letters》 (光电子快报（英文版）)

年 卷 期：2009年第5卷第5期

页      面：383-386页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：supported by the National Natural Science Foundation of China (No. 50675017) 

主　　题：直线度误差 误差测量 激光束 路径 补偿 光束漂移 数学模型 测量精度 

摘      要：A novel method for laser beam straightness error measurements based on common-path compensation is proposed. The basic principle of the method is described and the math-model is established. Furthermore,the influence of laser beam drift on straightness error measurements is analyzed. The experimental results show that the measurement accuracy can be greatly improved by using the common-path compensation for laser beam drift.